The ionPROTM vacuum system is a brand-new production line dedicated to the treatment of large flat parts and products with the innovative ion implantation technology developed by IONICS. Five Hardion ion guns arranged in line ensure the efficiency and homogeneity of the ion implantation treatment. The lock chamber is composed of two loading plates allowing a fluent semi continuous treatment in the process chamber. The treated surface area reached 1600x1800 mm with a maximum speed of 150mm/s. Well suited for industrial upscaling steps and small productions, the system is now operational. The system has been designed in collaboration with AGC, GRAUX and MATERIA NOVA.
